半導體區域洗滌塔水回收系統規劃設計與工程發包之研究

Abstract

台灣半導體廠所排放溫室效應氣體種類有SF6、C4H8、NF3、C2F6、C3F8、C4F8、.. 台灣半導體協會因應環保需求，要求半導體廠設置製程尾氣處理系統。早期6吋、8吋晶圓廠因製程較小相對用水量不多Local Scrubber排水直接排入廢水廠氟系廢水處理既可。但近年來科技日益發達，12吋晶圓廠設立後Local Scrubber排水量大量增加，為配合回收率及環保要求各廠紛紛設立Local Scrubber水回收系統。Local Scrubber排水水質污染物眾多濃度低，若回收至純水系統，污染物濃度變化太大容易污染純水系統，因此各半導體廠皆以密閉回收方式進行回收。 本文將以個人經驗為主軸進行各廠水質調查，收集半導體廠Local Scrubber相關文獻再進行系統規劃設計最後進行系統發包再以專家訪談方式統計排名列出重要關鍵事項發包與規劃成功因素供業界參考。前十項發包與規劃成功因素有、主導人員專業水處理經驗、控制工程進度平衡公司付款速度配合公司資產運作、根據公司產能需求調整施工進度、主導人員設計期間能與廠商及相關人員進行良好的溝通、承包商財務是否健全、對業主承包工程的意願、進行施工時間管控表對上級長官報告工程進度、合理的工程利潤可兼顧工程品質及售後服務、固定舉行日會週會月會進行工程進度溝通及受上級長官與廠商信任。

The varieties of greenhouse gas are SF6、C4H8、NF3、C2F6、C3F8、C4F8 --- and so on exhausted by Taiwan's semiconductor companies. In order to meet the environmental requirements, Taiwan Semiconductor Industry Association requested semiconductor companies to set up relevant exhausting treatment systems in the process. As the process and the utility of water quantity at 6” and 8” fab are not so huge at early stages, the effluent from local scrubber generally was drained to the wastewater end (eq, fluoride-containing wastewater). However, as the technology developed increasingly in recent years, and the effluent from of loal scrubbers increased greatly after the establishment of 12”fab. Each company has to set up the local scrubber water recycling system to harmony with the reuse percentage and regulatory requirements. As the multi-pollutant and law concentration of local scrubber displacement, pollutant concentrations changed so much and polluted pure water system easily if recycled to pure water system. Each semi-conductor company conducts the water reuse with the way of closed system.

This research basis on personal experience was to collect relevant local scrubber documentation of each company. The system program design as well as the subcontract is porposed. Then the major success elements of sobcontract and program for the reference of others were listed. The major success elements mentioned above include (1) the professional experience of leading staff in water treatment field (2) the progress of engineering balance control and the payment effeciency to harmony with the operation of the company’s assets (3) the adjustment of the construction schedule according to the company's production capacity needs (4) the well communication between the leading staff and relevant vendors during the designed program (5) the financial soundness of the contractor (6) the will of constractor to constract the project (7) the schedule control and the progress report to the supervisors (8) the reasonable profit can be the benefit of engineering project quality and after-sales service (9) the good chanel of communication through regular daily, weekly and monthly meeting (10) the trusted degree by supervisors and vendors.