應用漫射光學檢測系統改善 LCD Cell 製程真偽缺陷偵測準確度

Abstract

本研究的目的在於改善 LCD Cell 後段製程中，因環境中的粉塵掉落於面板上，造成 Cell Test AOI (Automatic optical inspection) 誤判為缺陷 (Defect) 而形成無謂的過殺 (Overkill)，進而造成面板無謂的重工，平白浪費機台產能。 本研究捨棄傳統的人工清潔機台的方式，改以利用不同的光源照射於面板之上，面板內的真實缺陷與面板上的粉塵受到光源照射會有不同的波長漫射，再利用影像比對，將粉塵所造成的假缺陷比對出來並將其座標記錄至矩陣內，其餘檢測 Pattern 如遇 particle array 內所含之點位，則當成 false defect。經過實驗證明，此方式確實有效，加裝紅外光測光設備可有效降低 AOI 判片 overkill。

In this research, we will improve the overkill which is the particles in the environment fall on the panel , and make Cell test AOI judgment be not correct in the LCD Cell process .And the senseless overkill will make panel repair and waste machine manufacture. This research forsakes clean machine by operator with tradition , and use different source to light up the panel. When the true defect in Cell and the particles on the panel surface lit , it will be different diffuse reflection. And then ,we use image compare to part the false defect cause by particle , and record the coordinates to array. If there is the same coordinate in particle array we meet during the others pattern checking process , it will be false defect. According the experiment , it will work . The infrared rays equipments will decrease the AOI overkill efficaciously , and the yield increase 22% , it will cost down NTD 5,500,000 every year.