LCD可回復輝點缺陷之研究

Abstract

輝點缺陷在LCD產業之中是最難克服之問題，其牽涉層面很廣，最常發生原因為異物所引起，而其成因可能為異物掉落各層膜間，或於掉落後影響曝光製程所殘留影子，也可能為配向膜上留下之痕跡，而這些在表面分析技術儀器發達的現今，非常值得進行觀察與分析。 在輝點缺陷之中也有較特殊的特性，可回復輝點就是一例。可回復輝點在檢查站攔下後，在顯微鏡觀察與表面分析之中無法得知其成因，而在進行加熱或擠壓等方式後，輝點可消失而改善。本研究利用各種實驗的方式，仔細分析探討可能發生之成因，並模擬其改善後的條件；運用有限的分析儀器進行惡化、觀察，最後分析結果發現其組成之成因與回復之方式！由回復之條件進行腦力激盪後，創新了改善技術，除了提升改善速度，亦減少破壞框膠結構與層膜附著性。

Defective pixels, or dot defects, is the most difficult problem to overcome for the LCD industry. The most common cause is particles that get between films or affect the residual shadows from the lithography process. Another possible cause is the trace left from the alignment film. Defective pixels merit observation and analysis because of advancement in surface analysis instruments. Pixels with unique properties also exist as defective pixels; examples of this are stuck pixels. Stuck pixels are intercepted at check stations; although the cause cannot be found using microscopic observation or surface analysis, they can be removed or improved by applying heat or pressure. This study investigated and analyzed the possible causes of defective pixels as well as simulated the conditions for improvement using various experimental methods. Using currently available analytical instruments to measure deterioration, and through observation, we discovered the causes and repairing methods.