溫度感測探針整合SU-8可撓式帶狀纜線於心臟外科手術之應用

Abstract

本論文呈現磷摻雜之複晶矽電阻式微機械溫度探針整合SU-8可撓式軟性纜線之研發製作以期應用於心臟手術之溫度量測。此溫度探針達到0.9°C之精準度並可經由準確控制摻雜濃度使得精準度進一步提升。實驗結果顯示探針擁有4N之機械強度(套用公式計算)並可在無彎曲折損的情況下輕易刺穿豬心，因此可確認此探針十分適合應用於人體心肌之穿刺定位量測。透過利用先前研發之低溫熱壓式金—金接合技術，SU-8軟性材料可製作出搭載金屬電性連接導線並且與溫度探針接合建構溫度量測系統以應用於生醫感測之訊號傳輸。可撓式軟性纜線傳輸技術展現生醫元件訊號傳輸之應用性以及微型手術儀器整合之發展潛力。

This thesis presents a p-type boron doped polysilicon resistive based micromachined temperature probe which is integrated with an SU-8/Cu flexible ribbon cable as electrical feedthrough for heart surgery application. The temperature sensor can provide as good as 0.9°C accuracy and can be further improved by well controlling the doping concentration in the poly-Si for having a larger temperature coefficient of resistance. Experimental results show the probe can easily penetrate pig myocardium with a mechanical strength as strong as 4N which will be good for the temperature measurement in various depths in the myocardium. In addition, combined with a low temperature Au-Au thermal-compressive bond (<200□C), an 82.4cm long flexible cable with 40 metal interconnect lines has been fabricated, bonded, and released from Si wafer to the temperature probe as electrical interconnects for signal transmission from in-situ to outside environment. It’s our belief that the flexible feedthrough technology can be applicable to most of the biomedical devices which require transmitting sensed signal to the outside of human body by wire during surgery process.