標題: MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter
作者: Chiu, Yi
Kuo, Chiung-Ting
Chu, Yu-Shan
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 1-Jul-2007
摘要: This paper presents a micro electrostatic vibration-to-electricity energy converter based on the micro-electromechanical system. For the 3.3 V supply voltage and 1 cm 2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 mu W/cm(2) for the optimal load of 8 M Omega. The device was fabricated in a silicon-on-insulator wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Fabrication processes are being refined to remove the back silicon substrate to eliminate residual particles and parasitic capacitance.
URI: http://dx.doi.org/10.1007/s00542-006-0348-z
http://hdl.handle.net/11536/4440
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0348-z
期刊: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume: 13
Issue: 11-12
起始頁: 1663
結束頁: 1669
Appears in Collections:Conferences Paper


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