具有電極的陽極處理氧化鋁薄膜對液晶配向之研究

Abstract

本研究是以陽極處理氧化鋁(AAO)薄膜作為液晶樣品的配向膜，以ITO透明導電模作為電極，一層很薄(10nm)的鈦膜作為黏著層，並使用O2 plasma製程增加ITO和金屬的黏著力，其結果可以讓AAO薄膜及電極不被破壞，且液晶樣品具有垂直配向。 具有電極的AAO樣品可利用電場控制液晶分子的方向，得到包含穿透率變化及樣品的反應時間，反應時間為90.8 ms。最後將電極製作成特定圖形，並利用電場量得極化錨定強度︰1.32 x 10-4 J/m2

Anodic aluminum oxide (AAO) thin films have been studied as an alignment layer for liquid crystal (LC) in recent year. Because the ITO thin film can be etched by the anodizing process, the choosing of electrode material under the AAO thin film has become an important subject. In this work, the liquid crystal (LC) cell with the anodic aluminum oxide on ITO glass has been demonstrated. After the ITO film has been modified by O2 plasma, a titanium film as an adhesion layer has been evaporated between ITO film and aluminum film. The liquid crystal molecules was aligned vertically on anodic aluminum oxide film with ITO glass and it can be controlled by applying electric field. The measured response time is 90.8 (ms) and polar anchoring strength is 1.32 x 10-4 (J/m2)