氧化鎢與氧化銥半導體晶片元件沼氣感測

Abstract

實驗是利用三氧化鎢以及二氧化銥兩種半導體材料，使用這兩種材料來製作一顆不需要電解質液的可對甲烷氣體濃度進行感測的半導體元件，其主要物理機制來自於氫離子與電子之雙重注入(double inject)。在元件中因二氧化銥薄膜內之氫離子可在外加偏壓下擴散至三氧化鎢，而使元件具有二極體開關功能。

此原件的製作過程中，是將上述兩種半導體材料以濺鍍法所製成，並於其中添加雜金屬銥作為增感劑提升元件靈敏度與穩定度。根據實驗結果，此二極體感測元件在順向電壓之下及高溫環境中，可對甲烷氣體的注入下有電性的改變。利用此特性，可規範此元件對甲烷氣體得靈敏度，並做為感測甲烷氣體的元件。

此元件優點：(1)不必添加電解質（液）；(2)二極體開關性質；(3)對氣體感測具有再現性；(4)靈敏度線性化；(5)靈敏度在特定操作溫度與電壓內具有穩定性高。

In this experiment use WO3 and IrO2 for semiconductor materials.The use of these two materials to make that no electrolyte solution on the concentration of methane gas sensor for semiconductor components. The main physical mechanism from the hydrogen iron injection of electrons (double inject). Components due to the iridium dioxide thin films of hydrogen ion diffusion in the applied bias to three tungsten oxide, Which component has the function of the diode switch. This original production process, this two semiconductor materials made of the sputtering method, and add miscellaneous metal iridium as a sensitizer to improve the device sensitivity and stability. According to the experimental results, the diode body sensing element under the forward voltage and high temperature environment, injection of methane gas under electrical changes. Use this feature, this component can regulate the sensitivity of methane gas, and as a sensing component of the methane gas. This component advantages: (1) do not need to add electrolyte (liquid); (2) diode switch (3) gas sensor reproducibility; (4) sensitivity linearization (5) sensitivity in a specific operating temperature and voltage stability.