硬磁鈷鎳錳磷與氧化鋁納米複合薄膜於微機電系統之應用

Abstract

在此篇論文中，我們利用直流電鍍的方法，把鈷鎳錳磷電鍍在陽極氧化鋁內，使其成為鈷鎳錳磷奈米線。為了瞭解磁性特性，奈米線被控制在不同孔徑(170奈米，230奈米)和長度(12微米，23微米，36微米)。而在孔徑170奈米和長度23微米的鈷鎳錳磷奈米線，其矯頑力達到2509Oe，剩磁達到3936高斯，而且最大磁能積達到14.3 kJ/m3。如同我們所知的，相對於鈷鎳錳磷薄膜，在永久磁鐵奈米線組成的薄膜上有非常大的垂直方向性和高的磁能密度，而且由於鈷鎳錳磷奈米線所產生的磁性特性和低溫度的製程，非常適合應用在微機電元件的應用。

In this thesis, the arrays of CoNiMnP nanowires were grown by employing the DC electrodeposition technique with an anodic alumina oxide (AAO) templates to form a CoNiMnP-AAO nanocomposite. The nanowires are controlled to have different diameter (170 nm, 230 nm) and length (12, 23, 36m) in order to investigate the magnetic properties. For the electroplated nanocomposite with the magnetic wire with 170 nmin diameter and 23um in length, the coercivity of out-of plane of the nanocomposite is 2509 Oe with the retentivityof 3936 Gauss, and the energy density is 14.3 kJ/m3. As we know, the hard magnetic nanocomposite film has the highest vertical anisotropy and energy density in comparison with the-state-of-the-arts CoNiMnP film, and the magnetic characteristics and related low temperature deposition process make itself suitable for many magnetic MEMS devices applications.