利用乙烯/氧氣/氮氣之預混式火燄生成二氧化鈦薄膜及其應用於染料敏化太陽能電池之初步研究

Abstract

本實驗以四異丙氧基鈦(TTIP)為前驅物，使用乙烯/氧氣/氮氣為燃料的預混式平板燄燃燒器，對一旋轉平台上之基材在15分鐘內沉積厚度30μm之二氧化鈦薄膜。並以X光繞射儀(XRD)與掃瞄式電子顯微鏡(SEM)、穿透式電子顯微鏡(TEM)分析產物之晶相、表面形貌以及粒徑分布。透過控制火燄當量比、前驅物濃度、火燄位置、轉盤轉速等實驗參數，生成之二氧化鈦晶相可達 97 % 之Anatase相。並且平均粒徑為12奈米，最大分布範圍在5-25奈米之間。最後，以ITO做為基材沉積二氧化鈦薄膜，並經過高溫爐450□C之退火處理後做為染料敏化太陽能電池(DSSC)之陽極進行封裝測試其電性，目前最佳光電效率可達2.8%。

In this study, C2H4/O2/N2 premixed flat flame has been used to deposit TiO2 films by using TTIP as precursor. After 15 minutes deposition, 30 μm thick TiO2 films grow upon substrates which embedded in a rotating disk. Synthesized particles were characterized by XRD, SEM, and TEM analysis to quantify crystallinity, observe morphology, and to measure particles size and distributions. By controlling flame equivalence ratio, precursor concentration, flame height, and disk rotation frequency, the synthesized particles can reach 97 percent anatase phase. The mean particle diameters are 12 nm, with a distribution from 5 to 25 nm. Finally, using ITO glass as substrates to deposit TiO2 films and annealing at 450□C for dye sensitized solar cells (DSSC) fabrication, we obtain the best cell efficiency of 2.8 percent.