基於輸出干擾觀測器分析半導體混貨批次控制之強健性

Abstract

批次控制技術已被廣泛的應用於半導體製造過程中，現今半導體廠內單一機台上必定有多種不同產品同時進行同一道製程工作，在這種製程情況下，可能因為產品過久未於機台上生產而找不到最佳的輸入值，並且半導體混貨製程的輸入-輸出模型通常會假設為線性靜態模型，但是實際製程中尚有其他會影響製程輸出的未考慮因素，所以會有模型誤差的問題存在，進而影響到控制器的穩定度和效能。本論文提出半導體混貨批次控制器的統一架構，稱為輸出干擾觀測器（Output Disturbance Observer, ODOB），此ODOB架構可對應於目前多數混貨控制機制，且相較於現有其他混貨控制方法，ODOB架構提供系統化之混貨製程強健穩定性分析方法，並提供在已知干擾之下保證其強健穩定性的最佳化參數。

Run-to-Run (RtR) control techniques have been used into semiconductor manufacturing process. There are many different products entering one tool to proceed to the same process in semiconductor factory nowadays. In this high-mix situation, it is hard to find out the optimal recipe for some products, and the process input-output model is usually assumed as a linear static model, but the behavior of a process model is affected by a number of unconsidered factors in actual process, so the uncertainty will always exist in the process. These two problems both effect upon the stability and performance of the controller. In this thesis, we present a unified framework for the mixed-product RtR controller which is called the Output Disturbance Observer (ODOB) structure, and simply analyze the robust stability for the mixed-product RtR controller based on ODOB, and explain the relation between ODOB and the mixed product RtR controller, and provides the method to obtain the optimal parameters which guarantee the optimal performance under the robust stability.