利用槽狀結構改善有機薄膜電晶體之氨氣感測

Abstract

本論文研究是探討利用蒸鍍技術將TiOPc晶相粉末轉化為α相的TiOPc薄膜以提供利於載子傳輸的π堆疊結構作為有機薄膜電晶體氣體感測元件的主動層，並於空氣環境下感測0.5 ppm的氨氣。再利用槽狀結構使氨氣分子能直接吸附於通道，進而增加電性改變的幅度。本實驗已證實此TiOPc 薄膜電晶體元件對於氨氣具有極高的敏感度與選擇性，能在室溫環境下偵測出0.5 ppm微量濃度的氨氣，並應用在肝病患者之自我檢測。最後將TiOPc 薄膜電晶體製作於不繡鋼軟性基板上，並彎曲至曲率半徑為1 cm的情況，發現電性並無明顯破壞及飄移，甚至可使用軟性TiOPc 薄膜電晶體元件感測0.5 ppm的氨氣，方便肝病患者黏貼於袖口，以利隨時隨地都能檢測肝的狀況。

In this research, we fabricated an OTFT device with TiOPc active layer to sense the ammonia. The TiOPc powder was deposited to a triclinic phase II crystal of titanyl phthalocyanine (α-TiOPc) film to obtain a π–π molecular packing. The device can sense 0.5 ppm ammonia in the air. Additionally, The TiOPc TFT used slit structures to enhance the ammonia sensitivity. In our study, we improve the TiOPc TFT with a high ammonia sensitivity and selectivity. The TiOPc TFT can detect 0.5 ppm ammonia in room temperature and it can let liver patient apply to detection. Finally, we fabricate the TiOPc TFT on flexible substrate to sense ammonia. The characteristics of the TiOPc TFT on flexible substrate is stable even the TiOPc TFT is bent in 1 cm of curvature.