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DC FieldValueLanguage
dc.contributor.authorWANG, DCen_US
dc.contributor.authorSHIE, JSen_US
dc.contributor.authorCHEN, SHen_US
dc.date.accessioned2014-12-08T15:06:19Z-
dc.date.available2014-12-08T15:06:19Z-
dc.date.issued1983en_US
dc.identifier.issn0015-0193en_US
dc.identifier.urihttp://hdl.handle.net/11536/4895-
dc.language.isoen_USen_US
dc.titleAQUEOUS PHOTOLITHOGRAPHIC ETCHING OF TGSen_US
dc.typeArticleen_US
dc.identifier.journalFERROELECTRICSen_US
dc.citation.volume49en_US
dc.citation.issue1-4en_US
dc.citation.spage317en_US
dc.citation.epage322en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:A1983RY74700045-
dc.citation.woscount1-
Appears in Collections:Articles