| Title: | AQUEOUS PHOTOLITHOGRAPHIC ETCHING OF TGS |
| Authors: | WANG, DC SHIE, JS CHEN, SH 交大名義發表 光電工程學系 National Chiao Tung University Department of Photonics |
| Issue Date: | 1983 |
| URI: | http://hdl.handle.net/11536/4895 |
| ISSN: | 0015-0193 |
| Journal: | FERROELECTRICS |
| Volume: | 49 |
| Issue: | 1-4 |
| Begin Page: | 317 |
| End Page: | 322 |
| Appears in Collections: | Articles |
- ENHANCED OXYGEN REACTIVE ION ETCHING RESISTANCE OF DIAZONAPHTHOQUINONE-POLY (FORMYLOXYSTYRENE) RESIST SYSTEM BY PHOTOACID CATALYZED PHOTO-FRIES REARRANGEMENT AND POTASSIUM-ION TREATMENT IN AQUEOUS-SOLUTION / LOONG, WA;SU, AN
- Formation of Core/Shell-Type ZnO/CeO(2) Nanorods and CeO(2) Nanotube Arrays by Aqueous Synthesis and Wet-Etching / Chen, Yung Sheng;Tseng, Tseung Yuen
- Formation of Core/Shell-Type ZnO/CeO2 Nanorods and CeO2 Nanotube Arrays by Aqueous Synthesis and Wet-Etching / Chen, Yung Sheng;Tseng, Tseung Yuen
- 矽在氫氧化鉀溶液的電化學蝕刻和保護層的研究 / 沈怡廷;Shen, Ying-Ting;羅正忠;Jen-Chung Lou
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