汽相蒸鍍四支柱單晶氧化鋅其自組性質及光電特性之研究

Abstract

本研究以不同於水平爐管之方式，採用近似密閉系統之垂直式汽相蒸鍍法來合成四支柱氧化鋅。多量有方向性的四支柱單晶氧化鋅如預期般地不藉由觸媒物產出於基材上。有方向性的四支柱氧化鋅藉由汽相-固化過程產出於矽基板及三氧化二鋁薄膜模板上。再者，藉由調控空氣、水蒸汽、過氧化氫之實驗參數來生成具高長徑比及多樣型貌的四支柱氧化鋅。消波塊狀的四支柱氧化鋅圓徑100奈米到超過1微米，長度超過10微米大量生成於基材上。於富氧濃度的反應裡，四支柱晶體更會朝其basal plane方向成長，且成長模式顯現出層層堆疊的螺旋方式。其晶體裡的含氧變化不僅影響其成長方位，也改變了其激發光效應。

In this letter, we report the Zinc Oxide tetrapods synthesized in quasi-closed system by vertical thermal vapor deposition in box furnace, which demonstrates a different method to the horizontal tube. As expected, fairly well-oriented single-crystalline ZnO tetrapods grew on the substrates without catalyst. The oriented growth of ZnO tetrapods had uniform shape and length, and had been accomplished on the silicon wafer and alumina-membrane template (AAM) via a vapor-solid (VS) process. Otherwise, by harnessing the experimental conditions—air, H2O vapor, and H2O2 vapor atmospheres—ZnO tetrapods had synthesized with various morphologies and high aspect ratios. Such ZnO tetrapods, typically 100 nm to over 1μm in diameter and up to about 10μm in length, were oriented in armor-unit-shape fashion and aggregated in the large yield on the substrates. The crystal growth of rods for tetrapods appeared to be helical like growth by layer-by-layer, and crystals preferred to grow toward the basal plane in rich oxygen concentration for reaction atmosphere. Oxygen contain for ZnO tetrapods influenced not only the orientation of growth but also the luminescence properties of its.