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dc.contributor.author焦德民en_US
dc.contributor.author雷添福en_US
dc.contributor.author李崇仁en_US
dc.date.accessioned2014-12-12T02:03:05Z-
dc.date.available2014-12-12T02:03:05Z-
dc.date.issued1984en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT732428009en_US
dc.identifier.urihttp://hdl.handle.net/11536/52028-
dc.language.isoen_USen_US
dc.title由薄複晶矽經熱氧化或熱氮化所製備之穿隧氧化層zh_TW
dc.titleTunnel oxide prepared by thermal oxidation or nitridation of a thin polysilicon film on siliconen_US
dc.typeThesisen_US
dc.contributor.department電子研究所zh_TW
Appears in Collections:Thesis