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dc.contributor.author廖和仁en_US
dc.contributor.author陳茂傑en_US
dc.date.accessioned2014-12-12T02:10:05Z-
dc.date.available2014-12-12T02:10:05Z-
dc.date.issued1991en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT804430031en_US
dc.identifier.urihttp://hdl.handle.net/11536/56484-
dc.language.isoen_USen_US
dc.title鈦/矽系統在積體電路應用上之材料特性與製程技術zh_TW
dc.titleMaterial Properties and Process Technologies of Ti/Si System Relevant to VLSI Applicationsen_US
dc.typeThesisen_US
dc.contributor.department電子研究所zh_TW
Appears in Collections:Thesis