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標題: 鈦/矽系統在積體電路應用上之材料特性與製程技術
Material Properties and Process Technologies of Ti/Si System Relevant to VLSI Applications
作者: 廖和仁
陳茂傑
電子研究所
公開日期: 1991
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT804430031
http://hdl.handle.net/11536/56484
Appears in Collections:Thesis


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