PLZT鐵電性薄膜之溶膠-凝膠製程和特性研究

Abstract

利用烷氧化合物溶液由旋轉塗佈的方式可成功地製備透明而無龜裂的 PLZT 8/65/35 鐵電性複晶薄膜. 本實驗將對前驅物溶液的配製, 熱處理 條件及薄膜的燒結做一討論. 同時也將討論DCCA甲醯胺及酸催化劑對薄膜 微結構的影響. 在攝氏650 度做退火處理30分鐘的膜其介電常數為700 . 而在攝氏600 度做30分鐘熱處理, 可製備出Pr=36.7 微庫侖/ 平方公分及 Ec=14.3 仟伏特/ 公分的膜. 而燒結時間, 加熱速率, 持溫溫度及燒結氣 氛對膜的特性的影響, 也將利用不同的分析技術來探討. Cracking-free transparaent ferroelectric polycrystalline PLZT 8/65/35thin films were prepared by spin-coating solution of complex alkoxides.The preparation of stock solution, firing conditions,and annealing of the films were described. The influence of DCCA formamide and acid catalysts on the micro- structures of the films are dicussed. The dielectric constants was about 700 when the sample sintered at 650.degree.C for 20 min. The remanent polarization and coercive filed were 36.7uC/ cm2 and 14.3kV/cm,respectively when the sample sintered at 600 .degree.C for 30 min.The effect of annealing time, heat rate, soaking temperature,and atmosphere on the film's properties were also studied by using various analysis techiques.