Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings

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DC Field	Value	Language
dc.contributor.author	Wu, WF	en_US
dc.contributor.author	Chiou, BS	en_US
dc.date.accessioned	2014-12-08T15:01:49Z	-
dc.date.available	2014-12-08T15:01:49Z	-
dc.date.issued	1997-05-01	en_US
dc.identifier.issn	0169-4332	en_US
dc.identifier.uri	http://hdl.handle.net/11536/577	-
dc.description.abstract	In this study, radio frequency (rf) magnetron sputtered ITO films were coated with reactively sputtered SiO2 films. The microhardness, pull-off strength, scratch adhesion strength, optical transmittance and reflectance of the SiO1/ITO/substrate system are investigated. Coating of SiO2 enhances both the hardness and pull-off strength and reduces the scratch critical load of the system. The optical transmittance in the visible range is also improved with the addition of SiO2.	en_US
dc.language.iso	en_US	en_US
dc.title	Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings	en_US
dc.type	Article	en_US
dc.identifier.journal	APPLIED SURFACE SCIENCE	en_US
dc.citation.volume	115	en_US
dc.citation.issue	1	en_US
dc.citation.spage	96	en_US
dc.citation.epage	102	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:A1997WX17800013	-
dc.citation.woscount	21	-
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