電阻薄膜對基板表面波之散射及吸收效應分析

Abstract

本文中我們主要是分析電阻薄膜對寄生在微波積體電路中表面波的散射及 吸收效應.為了求得在薄膜上的感應電流,首先利用在薄膜上的邊界條件得 出混合電位積分方程式,再使用動差法求解.最後藉著留數定理及穩態相位 點法將激發出來的表面波及輻射波求出.經過驗證後,我們改變表面波的入 射角度,薄膜寬度及薄膜電阻和操縱頻率等參數,來探討對散射表面波能 量,輻射於空間中電波之能量及被薄膜吸收能量的影響. In this research we analyze the scattering and absorption , by a resistive strip coated on the substrate, of the TM dominant mode surface waves parasitizing in a (monolithic) microwave integrated circuit. To tackle this problem, a mixed potential integral equation (MPIE) for the induced currents on the strip is first established based on the resistive boundary condition, and solved by the method of moment. The excited surface waves and free space waves are then extracted using the residue theorem and the stationary phase point method. After the validity of the present analysis being verified, several parameters, such as the incidence angle of the TM dominant mode wave, the strip width, the strip resistance and the operating frequency, are changed in turn to investigate the influences on the variations of the scattered surface-wave power, the free- space-wave power, and the power absorbed by the strip.