標題: 多孔矽的製作與特性探討
Fabrication and characterization of porous silicon
作者: 高揚哲
Yang-Jer Gau
謝正雄
Jin-Shown Shie
光電工程學系
關鍵字: 多孔矽;熱墊;熱型微感測元件;Porous Silicon;Thermal Pad;Thermal Microsensor
公開日期: 1994
摘要: 本論文研究方向在於探討多孔矽的形成及其基本特性。由熱傳量測結果顯
示,熱導率為2.8W/m•℃,比單晶矽低53倍。利用多孔矽熱導低的特性,
可應用在熱型微感測元件的熱絕緣薄板上。使用多孔矽做成的熱感測元件
,應可以降低應力及提高良率。
To perform the fabriaction and characterization of porous
silicon is the goal of this thesis. In experiment, we find that
the thermal conductivity of porous silicon is 2.8 W/m•℃
,which is as smaller as a factor of 53 than crystalline
silicon. Hence, the porous silicon can be used as a isolating
plate in thermal microsensors. Using this technique, a thermal
pad with lower stress and higher yield will be achieved.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT830123016
http://hdl.handle.net/11536/58869
顯示於類別:畢業論文