完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | 何梓賢 | en_US |
dc.contributor.author | Ho Chi In | en_US |
dc.contributor.author | 黃凱風 | en_US |
dc.contributor.author | Dr. Kai-Feng Huang | en_US |
dc.date.accessioned | 2014-12-12T02:13:35Z | - |
dc.date.available | 2014-12-12T02:13:35Z | - |
dc.date.issued | 1994 | en_US |
dc.identifier.uri | http://140.113.39.130/cdrfb3/record/nctu/#NT830429007 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/59148 | - |
dc.description.abstract | 本文主要的工作為製作一簡單使用的安裝配件(submount),以完成光電元 件與光纖的耦合作業。安裝配件使用的材料為矽晶片,並通過半導體製程 方法完成。配件上將提供自動對準功能,以減短一般耦合程序上耗費的時 間。文中並針對自動對準機制作測試,以了解自動對準的經過與準確度。 最後把安裝配件應用在面射型雷射(SEL)與光纖的耦合包裝,其結果能達 到90%的耦合率。 A simple and useful Si-Submount was constructed and used to finished the coupling between an opto-electronic device and an optical fiber. Submount is made of Si(100)-wafer, in according to the mature silicon fabrication technique. One of its significant function, self-alignment, was to reduce the time consuming during active alignment which was required in case light coupling into an fiber-core. Testing on the accuracy of self-alignment was performed with the submount we made and LED devices. Finally, we conduct the whole self-aligned packaging among SEL device, submount and optical fiber, and obtained an coupling efficiency up to 90%. | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.subject | 安裝配件;矽材料異方性蝕刻;自動對準耦合功能 | zh_TW |
dc.subject | submount;silicon anisotropic etching;self-aligned coupling | en_US |
dc.title | 矽安裝配件完成光纖與光電元件之自動對準耦合 | zh_TW |
dc.title | Self-aligned coupling between optical fiber and opto-electronic device on Si-submount | en_US |
dc.type | Thesis | en_US |
dc.contributor.department | 電子物理系所 | zh_TW |
顯示於類別: | 畢業論文 |