化合物自動組成相關的光學特性增強

Abstract

本論文要旨在研究砷化鋁鎵(AlGaAs) 與磷化銦鎵鋁(InGaAlP)的自動組成 相關之光學特性增強。由於這些可見紅光材料在商業上有極高之經濟價 值,這使得我們對此研究感到興趣。砷化鋁鎵(AlGaAs) 和磷化銦鎵鋁( InGaAlP) 薄膜的光學特性與薄膜磊晶時的成長溫度,背景濕度,氧含量等 成長狀況有密切的關係。當這些變數都已達最佳化以後, 若想要更進一步 的改進光學特質是有點困難的。在本文中我們將展示一個嶄新的成長技 巧, 我們利用成長時的自動組成與後續快速熱退火的方法來更進一步增進 薄膜之光學特性。 In this thesis, the investigation of ordering related opt- ical properties enhancement of AlGaAs and InGaAlP is reported. We are interested in these visible red light materials for co- mmercial use. The optical properties of AlGaAs and InGaAlP are strongly dependent on the growth condition such as growth tem- perature, background moisture, and oxygen contents. It is rat- her difficult to further improve the optical quality after th- ese parameters were optimized. Here we have shown a novel app- roach-growth induced natural ordering to further improve the optical quality. AlGaAs were grown by MBE on (100) and (111)B substrates at different growth temperatures. Strong enhancement in the lumi- nescence intensity is observed in AlGaAs epitaxial layers gro- wn on misoriented (111)B GaAs as compared to those simultaneo- usly grown on (100) GaAs. Similar ordering related PL intensity enhancement and red shift of PL peak energy were also observed in InGaAlP/InGaP s- trained MQW laser diode structure.