標題: Determination of dissociative fragment-adsorbate interaction energy during chemisorption of the diatomic molecule HCl on Si(100)
作者: Hsieh, Ming-Feng
Cheng, Jen-Yin
Yang, Jenq-Cheng
Lin, Deng-Sung
Morgenstern, Karina
Pai, Woei-Wu
物理研究所
Institute of Physics
公開日期: 15-Jan-2010
摘要: This study investigates the surface chemistry and the ordering characteristics of coadsorbed hydrogen and chlorine atoms, generated by the exposure of the Si(100) surface to gas-phase HCl molecules at various substrate temperatures, by scanning tunneling microscopy (STM), core-level photoemission spectroscopy, and Monte Carlo simulation. Experimental results show that saturation exposure to HCl causes all surface dangling bonds to be terminated by the two fragments H and Cl atoms and that the number of H-terminated sites exceeds that of Cl-terminated ones by more than 10%. This finding suggests that, in addition to the dominant dissociative chemisorption, atomically selective chemisorption or atom abstraction occurs. STM images reveal that some Cl-terminated sites form patches with a local 2 x 2 structure at 110 K and that the degree of ordering is reduced as the substrate temperature increases. Results of Monte Carlo simulations demonstrate the importance of including dissociative fragment-adsorbate interactions during the random adsorption of diatomic molecules. Comparing the correlations between Cl-terminated sites identified from STM images and those predicted by simulation reveals two effective interaction energies of 8.5 +/- 2.0 and 3.5 +/- 2.0 meV between a dissociative fragment Cl atom and a nearest neighboring Cl adsorbates in the same dimer row and in the adjacent row, respectively.
URI: http://dx.doi.org/10.1103/PhysRevB.81.045324
http://hdl.handle.net/11536/5960
ISSN: 1098-0121
DOI: 10.1103/PhysRevB.81.045324
期刊: PHYSICAL REVIEW B
Volume: 81
Issue: 4
起始頁: 0
結束頁: 0
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