以射頻磁控式濺鍍法製備鈦酸鋯鉛(PZT)薄膜

Full metadata record

DC Field	Value	Language
dc.contributor.author	朱聰明	en_US
dc.contributor.author	Zhu, Cong Ming	en_US
dc.contributor.author	林鵬	en_US
dc.contributor.author	Lin, Peng	en_US
dc.date.accessioned	2014-12-12T02:14:12Z	-
dc.date.available	2014-12-12T02:14:12Z	-
dc.date.issued	1994	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT832159012	en_US
dc.identifier.uri	http://hdl.handle.net/11536/59676	-
dc.language.iso	en_US	en_US
dc.title	以射頻磁控式濺鍍法製備鈦酸鋯鉛(PZT)薄膜	zh_TW
dc.title	Preparation of PZT thin films by magnetron RF sputtering	en_US
dc.type	Thesis	en_US
dc.contributor.department	材料科學與工程學系	zh_TW
Appears in Collections:	Thesis