晶圓製造廠考慮等候時間限制之派工策略

Abstract

半導體是近年來發展最快速的產業。由於其製程極為複雜，機台加工特性 各不相同，造成了生產管制的困難。目前大多數的研究及終於縮短生產流 程時間，對於如何提高產品良率之研究相對較少。因此本研究針對影響產 品良率之重要因素：等候時間限制，分析其影響及派工時應考慮的因素， 提出一套派工策略。經由磨你的驗證，本研究提出之等候時間限制派工策 略能在不增加生產流程時間的條件下，有效的降低晶圓之重加工次數，並 提高產品的良率 Semi-conductor industry is highly developing during these years in Taiwan.Its complicatedprocessis and various characteristics of machines increases thedifficulty in the production control. However,moset studies, so far,concentrate on howto shortern the production cycle time rather tha to improve the yield of wafer fabricationTherefore,the major objective of this research is to develop a dispatching strategy focusing on "Queue Time Limit" which highly influences the yield of wafer fabrication.by carefully analyzing itsimpacts on the fab and the pertinent factors that ahould be considered while the dispatching is executed.a Queue Time Limit dispatching strtegy is developed.To validate the effectiveness of the dispatching strtegy proposedin this research.a simulation model is construted.The simulation results indecate that the dispatching stategy developed in this research can effectively reduce the numbers of wafer reworks and improve the yield of wafer fabrication significantly while not increasing the production cycle time.