利用積體電路技術製作二進階微透鏡的研究

Abstract

二進階微透鏡因具有輕、薄、短小、可大面積製作的特性,在光計算 以及光通訊系統等方面,具有多種用途.而利用積體電路技術所製作的二進 階微透鏡更由於重製性與均勻性良好,因此能夠大量製造,降低成本. 本文是利用富立葉光學與繞射理論作為理論的基礎.從這個基礎上討論二 進階微透鏡的色差.並以He-Ne雷射的中心波長設計應用於可見光範圍的二 進階微透鏡陣列,設計的焦距分別為14mm、7mm、3.5mm. 從測量的結果顯示,微透鏡陣列能夠達成聚焦的作用,但由於製程中誤差的 因素,造成製作完成的微透鏡陣列無法達成期望的光學特性.因此本文的最 後,會根據測量的結果討論在製作過程及量測中引起誤差的因素,以期能提 高在未來所製作二進階微透鏡的光學性質. 利用本文的討論,對於使用 積體電路技術製作以石英為基板的二進階微透鏡的方法,希望能有初步的 認識. The binary microlens, characterized by its thinness, lightness, large area produciable, are very useful in optical communications and optical computing systems. We are able to mass-produce but cost less by using IC technique to fabricate binary microlens because this technique is good reproduction and uniformity. In this thesis, we introduced the theory of binary optics based on Fourier optics and diffraction theory. Then we discussed the chromatic aberration of binary microlens by using these theories. And we de8igned binary microlens arrays for visual light region use woking at the wavelength 632.8nm of He-Ne laserswith the focal length of 14mm,7mmand 3.5mm. The test result showed that the microlens had the focus feature as we designed but failed to meet the expected quality. The reason is that there were various errors in the making process. Thus,we will discussed the factors due to errors in the measuring and tesing process at the last of this thesis. By using this way,we expect we can increase the optical quality of binay microlens which we will make in th future. After reading this paper finished, we hope readers can have basic knowledge of fabricating binary microlens on fused silica.