金屬-絕緣體-金屬之變壓器的合成與應用

Abstract

本論文提出一種新式的方法來設計在微波單晶積體電路上所使用的傳輸線 變壓器。這種變壓器是需要兩層金屬的結構做傳輸和耦合，而這樣的結構 是很容易在微波單晶積體電路上，利用MIM的製程來製作。根據場論的方 法來計算1:4阻抗比的變壓器和反相變壓器的結構形狀，可以得到他們的S 參數。這些網路參數在變壓器的合成分析是有用的。從1:4阻抗比的變壓 器的網路參數中，可以分析出由集總元件構成的等效電路。使用這相同的 設計手法來設計低通濾波器來做例子，實作測量和理論模擬是相當吻合的 。最後，提出一種新型的單晶差動低雜訊放大器電路當做本論文的應用電 路；而上述中所有的電壓器都將被使用在這個電路中。 A novel design methodology for transmission-line transformers used in monolithic microwave integrated circuits (MMICs) is presented in this thesis.The transformers are easy to be implemented by metal-insulator-metal (MIM) process because they need only two levels of metal interconnections. The S-parameters of a1:4 impedance transformer and a differential balun have been obtainedby field-theoretical means. These network models are useful for synthesis of the transformers. The fitted lumped equivalent circuit for the 1:4 impedance transformeris extracted from the model. A low-pass filter example is designed by the theoretical approach. Agreement is obtainedwhile comparing the theoretical and experimental results. A novel monolithic differential low noise amplifier usingall the transformers is presented as the application.