選擇性鎢沉積在極大型積體電路上之應用

Full metadata record

DC Field	Value	Language
dc.contributor.author	葉文冠	en_US
dc.contributor.author	陳茂傑	en_US
dc.date.accessioned	2014-12-12T02:18:22Z	-
dc.date.available	2014-12-12T02:18:22Z	-
dc.date.issued	1996	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#NT856430105	en_US
dc.identifier.uri	http://hdl.handle.net/11536/62539	-
dc.language.iso	zh_TW	en_US
dc.title	選擇性鎢沉積在極大型積體電路上之應用	zh_TW
dc.title	Selective CVD-W for ULSI applications	en_US
dc.type	Thesis	en_US
dc.contributor.department	電子研究所	zh_TW
Appears in Collections:	Thesis