氮化矽鼓膜上微帶天線之研究

Abstract

本文主旨在提出一氮化矽鼓膜上製作簡單微帶天線結構,此天線結構是 一以空氣為基材, 天線形成於一低應力的氮化矽薄膜. 並製作一以介電常 數2.2為基材的天線做為比較 實驗結果顯示, 改良後的鼓膜微帶天線和 介電常數2.2為基材的天線做比較有較大的頻寬和較高的增益,同時以較大 的接地面可得到較理小的天線場型 The subject of this paper is to investigate a microstrip patch antenna fabricated on silicon nitride membrane. The patch antenna is fabricatedon a low-stress silicon nitride membrane with air as its substrate. Aregular patch antenna with dielectric constant of 2.2 is also fabricatedfor comparison. It is seen from the experimental results that as compared to the normal patch antenna, the suspended patch antenna has wider bandwidth and highergain. Itis also found that an antenna with larger ground plane can have better radiation