大角度紅外線感測器之製作

Abstract

本論文欲以新型浮板結構製作的大角度紅外線感測器，乃 是利用結構體與感測薄膜間應力的差異，所造成的浮板上彎之 特殊幾何結構。該型感測器在受到與基板平行的輻射照射時， 仍可接收到較多的輻射功率。另又針對TMAH，量測其對不同 介電層的蝕刻速率，以作為製作元件參考之用。唯元件製作結 果為其無法工作，最後根據製程上的缺失，提出改進方法。

This thesis intends to utilize a new type membrane structure to fabricate what is called a wide angle bolometer. We use the difference of the stresses between the membrane and sensor film to make the structure curl up. This kind of bolometer can absorb more adiation even if the direction of the radiation is parallel to the substrate.Besides, we measure the ethcing rate of TMAH to different dielectric layers for which could be used as the reference of fabricating devices.Sad to say the result of fabricating the bolometer is that it can't work.At last according to the defects of the fabrication process, we propose the methods to improve it.