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dc.contributor.authorLu, Chih-Chengen_US
dc.contributor.authorLiao, Kuan-Hsunen_US
dc.contributor.authorTsai, Jeff Tsung-Huien_US
dc.contributor.authorLiu, Chueh-Yangen_US
dc.contributor.authorLeu, Jih-Perngen_US
dc.date.accessioned2014-12-08T15:08:09Z-
dc.date.available2014-12-08T15:08:09Z-
dc.date.issued2009-12-01en_US
dc.identifier.issn1016-2372en_US
dc.identifier.urihttp://dx.doi.org/10.4015/S1016237209001684en_US
dc.identifier.urihttp://hdl.handle.net/11536/6361-
dc.description.abstractThis article reports a new class of silicon-based microgas sensors utilizing hexagonally-ordered mesoporous carbon powders (MCPs) as the sensitive film. The mesoporous carbon powders featuring high-specific surface area are replicated by the SBA-15 silica template and immobilized between Cr electrodes on a 9 x 9 cm silicon chip by using a. c. dielectrophoresis (DEP) process at room temperature. The silicon sensor platform comprises Cr microheaters embedded in a dielectric thin membrane manufactured by microelectromechanical systems back-etching techniques. It is shown that MCPs can be satisfactorily aligned along electric fields and accumulated to the electrode area. Investigations into CO detection are carried out to verify gas-sensitive characteristics of the MCP nanofilm. Our experimental results disclose the mesoporous carbon powders are successfully chemoresistive to CO, and demonstrate distinct resistance change with respect to ppm-level variation. In addition, response time, recovery time, and reproducible sensing behavior are experimentally obtained.en_US
dc.language.isoen_USen_US
dc.subjectMesoporous carbon powderen_US
dc.subjectDielectrophoresisen_US
dc.subjectMicrohotplateen_US
dc.subjectMEMSen_US
dc.subjectGas sensoren_US
dc.titleMESOPOROUS CARBON POWDER GAS SENSORS FOR DETECTION OF CARBON MONOXIDEen_US
dc.typeArticleen_US
dc.identifier.doi10.4015/S1016237209001684en_US
dc.identifier.journalBIOMEDICAL ENGINEERING-APPLICATIONS BASIS COMMUNICATIONSen_US
dc.citation.volume21en_US
dc.citation.issue6en_US
dc.citation.spage399en_US
dc.citation.epage404en_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000272918500009-
dc.citation.woscount1-
Appears in Collections:Articles