标题: 以溶凝胶法制备氧化矽-聚亚醯胺复合材料
Preparation of Silica-Polyimide Hybrids Using Sol-Gel Process
作者: 廖姵旻
Pammy Liao
谢宗雍
Dr. T. E. Hsieh
材料科学与工程学系
关键字: 溶凝胶法;氧化矽;聚亚醯胺;Sol-Gel Process;Silica;Polyimide
公开日期: 1998
摘要: 本实验以溶凝胶法(Sol-Gel Process)制备具有低介电系数特性的氧化矽-聚亚醯胺复合材料。红外光谱分析(FTIR)的结果显示,含聚醯胺酸的原料可藉适当的烘烤硬化处理形成含氧化矽微粒的聚亚醯胺复合结构;热分析实验则分别显示所有合成的材料均有280□C以上的玻璃转换温度与600□C以上的热分解温度,因此氧化矽-聚亚醯胺复合材料具有优良的热稳定性质。电性量测实验显示,材料的介电系数与其四乙氧基矽(TEOS)的添加量有关,对有机与无机成分之间为弱键结的Class I复合材料而言,当TEOS含量为35%时具有最低的介电系数特性;合成时水解催化剂的比例为2时,介电系数可低至2.24。对有机与无机成分之间为强键结的Class II复合材料而言,当TEOS含量为30%时具有最低的介电系数特性(3.95),但其介电系数值皆高于Class I材料。以氟化聚亚醯胺取代试片中之有机成分或添加微量的GOTMS亦能降低介电系数。微观结构的观察显示,氧化矽微粒之尺寸、形状与分布等因素均影响材料的电性性质;当复合材料具有形状与分布均匀且尺寸最小的氧化矽微粒时,其具有最佳的介电系数性质。
In this work sol-gel process was applied to prepare the low dielectric silica-polyimide hybrids and their physical properties were investigated. The FTIR analysis revealed that the hybrid precursors might transform into polyimides containing finely dispersed silica particles by an appropriate curing treatment. As indicated by thermal analysis, all the hybrid specimens exhibited excellent thermal stability that they had glass transition temperatures higher than 280□C and decomposition temperatures higher than 600□C. Electrical measurement indicated that the TEOS content affected the dielectric constant of hybrids. In Class I specimen with hydrolysis ratio = 2, the finely dispersed aerogel structure resulted a dielectric constant as low as 2.24 when TEOS = 35%. As to the Class II hybrids, the minimum dielectric constant (3.95) was observed in the specimen containing □30% TEOS. Nevertheless, dielectric constants of Class II hybrids were inferior to those of Class I hybrids since the aerogels could not effectively formed. Replacement of organic component by fluorinated polyimide or addition of a small amount of GOTMS was also beneficial to the reduction of dielectric constant of the hybrids. Microstructure characterization revealed that the size, shape and distribution silica aerogels affected the dielectric properties of hybrids. The hybrid with optimum dielectric property may be achieved when a homogeneously distributed silica aerogels with ultra fine particle size was formed.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT870159005
http://hdl.handle.net/11536/63907
显示于类别:Thesis