標題: | A Web Services-Based Collaborative Planning, Forecasting, and Replenishment (CPFR) Framework for Managing Spare Parts of Semiconductor Equipment |
作者: | Chen, Mu-Chen Chen, Kai-Ying Hsu, Ming-Fu Yeh, Cheng-Ta 運輸與物流管理系 註:原交通所+運管所 Department of Transportation and Logistics Management |
關鍵字: | Collaborative planning;forecasting and replenishment (CPFR);e-diagnostics;e-maintenance;e-manufacturing;semiconductor industry;spare parts;web services |
公開日期: | 1-十一月-2009 |
摘要: | In a semiconductor foundry, equipment failure has long been recognized as a major cause of unpredicted breakdown which results in an excessive production loss. Equipment maintenance management is one of the essential tasks in semiconductor manufacturing. Due to the prosperity of Internet and IT, e-diagnostics and e-maintenance through the web have become important applications in the semiconductor industry. Web services (WSs) can assist the data integration in heterogeneous e-facturing systems to support faster and remote maintenance functions. In this paper, a WS-based collaborative planning, forecasting and replenishment (CPFR) framework, namely WS-CPFR, is developed to collaboratively manage the logistics activities of spare parts in semiconductor equipment between equipment suppliers and semiconductor factories. |
URI: | http://dx.doi.org/10.1109/TSM.2009.2028217 http://hdl.handle.net/11536/6538 |
ISSN: | 0894-6507 |
DOI: | 10.1109/TSM.2009.2028217 |
期刊: | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING |
Volume: | 22 |
Issue: | 4 |
起始頁: | 596 |
結束頁: | 600 |
顯示於類別: | 期刊論文 |