超音波清洗槽之數值模擬

Abstract

超音波清洗槽之數值模擬 研究生：唐思維 指導教授：傅武雄 國立交通大學機械工程學系 摘要 本研究的主要目的在於探討超音波清洗槽內部整體的流場變化，並且模擬清洗槽受震盪壁面影響而流場改變的情形。本文的計算方法是應用數值計算軟體STAR-CD來模擬清洗槽內部流場情況，超音波震盪的邊界，則是以一週期變化的速度邊界來模擬。結果得知，清洗槽的幾何形狀影響著去除微粒的效率。流場中加入震盪波，可以降低壁面上邊界層的厚度，增加壁面剪應力，並且流體通過以多孔性介質模擬之擋板時，較不受擋板孔隙分佈大小的影響。

Numerical Simulation of Supersonic Clean Bench Student: Szu-Wei Tang Advisor: Wu-Shung Fu Department of Mechanical Engineering National Chiao Tung University Abstract High-frequency megasonic cleaning is now an essential technology for semiconductor processing. Despite an abundance of empirical data and industry experience, a thorough understanding of the fundamentals of megasonic cleaning has proven elusive. The aim of the study is to investigate the flow properties during the Supersonic transducer operated and the mechanical effects on wafer in the clean bench by utilized a CFD code of “Star-CD.” The transducer is simulated by a wall subjected to a periodic velocity varying with time. From the results of the simulation, it can be found that the cleaning efficiency is significantly influenced by the geometry of the clean bench, and the pressure waves in the flow field can produce much thinner boundary layers and increase shear stress on the wall.