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dc.contributor.authorChen, Yi-Tangen_US
dc.contributor.authorLin, Sean S-Y.en_US
dc.contributor.authorKim, Sung-Oen_US
dc.contributor.authorHa, Suen_US
dc.date.accessioned2014-12-08T15:08:38Z-
dc.date.available2014-12-08T15:08:38Z-
dc.date.issued2009-10-01en_US
dc.identifier.issn1480-2422en_US
dc.identifier.urihttp://hdl.handle.net/11536/6622-
dc.description.abstractThe membranes based on silicon substrate filled with Nafion (R) have been fabricated as a proton exchange membrane for miniature fuel cells. This fabrication utilizes the micromachining procedures including photo-lithography, plasma-enhanced chemical vapor deposition (PECVD), and dry and wet etching processes. The device size of the silicon membrane filled with Nafion (R) was 1 cm x 1 cm. The pores were smaller than 500 nm. ne cross-sectional shape of the silicon membrane was an inverse pyramid structure to improve its mechanical strength and to enhance its surface treatment process. This technique combines the advantages of Nafion (R) with a good proton conductivity and silicon membrane, such as easy serial and parallel integration, respectively.en_US
dc.language.isoen_USen_US
dc.subjectProton Conducting Silicon Membraneen_US
dc.subjectPEMen_US
dc.subjectNafionen_US
dc.subjectMiniature Fuel Cellsen_US
dc.titlePreparation of a New Proton Conducting Silicon Membrane for Miniature Fuel Cellsen_US
dc.typeArticleen_US
dc.identifier.journalJOURNAL OF NEW MATERIALS FOR ELECTROCHEMICAL SYSTEMSen_US
dc.citation.volume12en_US
dc.citation.issue4en_US
dc.citation.spage171en_US
dc.citation.epage175en_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000273444000001-
dc.citation.woscount0-
Appears in Collections:Articles