Preparation of a New Proton Conducting Silicon Membrane for Miniature Fuel Cells

Abstract

The membranes based on silicon substrate filled with Nafion (R) have been fabricated as a proton exchange membrane for miniature fuel cells. This fabrication utilizes the micromachining procedures including photo-lithography, plasma-enhanced chemical vapor deposition (PECVD), and dry and wet etching processes. The device size of the silicon membrane filled with Nafion (R) was 1 cm x 1 cm. The pores were smaller than 500 nm. ne cross-sectional shape of the silicon membrane was an inverse pyramid structure to improve its mechanical strength and to enhance its surface treatment process. This technique combines the advantages of Nafion (R) with a good proton conductivity and silicon membrane, such as easy serial and parallel integration, respectively.