完整後設資料紀錄
DC 欄位語言
dc.contributor.author李俊翰en_US
dc.contributor.authorJun Han Lien_US
dc.contributor.author陳三元en_US
dc.contributor.authorSan-Yuan Chanen_US
dc.date.accessioned2014-12-12T02:24:50Z-
dc.date.available2014-12-12T02:24:50Z-
dc.date.issued2000en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT890159045en_US
dc.identifier.urihttp://hdl.handle.net/11536/66670-
dc.description.abstractPZT薄膜所具有優越之壓電特性在微機電系統之感測器與致動器中扮演重要的角色。在本文以Sol-gel法製作PZT壓電薄膜並結合以微細加工技術製成之微懸臂樑與微懸膜製作出PZT壓電微致動器並建立其一套製作流程系統。其中PZT薄膜成長於白金之電極上,並發現各種介於Si3N4或SiO2之白金附著金屬層會影響PZT薄膜之顯微結構與結晶相結構。此外觀察微懸臂樑之偏折量來分析各層薄膜間產生的殘留應變量,進而調整各層薄膜的厚度來改善微懸臂樑之平整狀況。製作出疊層之PZT微致動器,以有限元素模擬分析單層與疊層之PZT微懸臂樑與微懸膜,並探討單層及疊層結構對於微動器性能上產生之差異。製作完成之微致動動器,利用都普勒干涉儀進行壓電效應之靜態與動態量測,證實微動器能成功運作。zh_TW
dc.description.abstractThe superior piezoelectric properties of ferroelectric materials make it suitable for micro-actuators applications. In this work, sol-gel process was used to deposit the PZT film on a 4” Si wafer by multiple spin-coating. By using micromaching technology, the fabrication process of a piezoelectric micro-actuator based on PZT-film micro-diaphram and cantilever-type structure has been developed. It was found that the adhesion metal in between Pt and Si3N4 or SiO2 has strong influence on phase crystallization and microstructure evolution of PZT films. The deflection of micro-cantilever beam was also evaluated in order to analyze the residual strain and flat effect of PZT beam by changing the layer thickness of Pt/PZT/Pt/Ta/ Si3N4 /Si structure. In addition, the fabrication process and physical characteristics of bi-layer PZT film structure was also developed. Finite element (FEM) simulation was further performed to discuss the difference between single layer and bi-layer PZT-film structure. The piezoelectric response of the PZT-based micro-actuator at static and resonant condition is measured by the Doppler interferometer that further demonstrates that it (PZT-film actuator) works properly.en_US
dc.language.isozh_TWen_US
dc.subject鋯鈦酸鉛zh_TW
dc.subject鐵電特性zh_TW
dc.subject壓電特性zh_TW
dc.subject致動器zh_TW
dc.subject懸臂樑zh_TW
dc.subject薄膜zh_TW
dc.subject溶膠凝膠zh_TW
dc.subject微機電zh_TW
dc.subjectPZTen_US
dc.subjectFerroelectricen_US
dc.subjectPiezoelectricen_US
dc.subjectactuatoren_US
dc.subjectcantileveren_US
dc.subjectThin-Filmen_US
dc.subjectsol-gelen_US
dc.subjectMEMSen_US
dc.titlePZT壓電微致動器之製程與鐵電特性研究zh_TW
dc.titleProcessing Development and Ferroelectric Properties of PZT Thin-Film Piezoelectric Micro-actuatoren_US
dc.typeThesisen_US
dc.contributor.department材料科學與工程學系zh_TW
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