基板種類、退火溫度與沉積方式對鈦酸鍶鋇（BaxSr1-XTiO3）薄膜電容器之介電特性與頻域特性之影響

Abstract

在本論文中, 將對鈦酸鍶鋇應用在電容器之介電層薄膜之應用做研究. 第一部份將著重於鈦酸鍶鋇薄膜的物理特性與鈦酸鍶鋇薄膜電容器的電特性來做一探討。第二部份將對於鈦酸鍶鋇薄膜電容器的微波特性與鈦酸鍶鋇薄膜電容器的頻率特性來做一探討。. 對於應用在高頻的元件上的電容器的介電層，鈦酸鍶鋇薄膜的介電嘗試值必須要足以符合要求。在工作頻率上升之後，其介電常數跟電特性都會隨著頻率的增加而衰減。因此，薄膜的介電常數值必須維持在一個定值。鈦酸鍶鋇薄膜是現今被研究的最多的一種材料之一，因為他有高介電常數，低漏電流密度，生命期超過十年，且在高頻下的衰減函數非常小。在此研究中，頻率特性是我們所著重的重點之一。

In this thesis, the high frequency applications of high dielectric-constant barium strontium titanate have been studies. The first topic focuses on the physical characteristics and electrical characteristics of the high dielectric-constant barium strontium titanate thin films and the high dielectric-constant barium strontium titanate MIM (Metal-Insulator-Metal) thin film capacitor. The second topic focuses on the microwave characteristics and frequency-dependent characteristics of the high dielectric-constant barium strontium titanate MIM thin film capacitor. For high frequency capacitors, the dielectric constant of the barium strontium titanate thin films must be large. As the working frequency increasing, the dielectric constant and the electrical characteristics of the capacitor will reduce as the frequency increase. Therefore, the dielectric constants of the barium strontium titanate thin film are needed to keep a large enough value. The BST is one of the most promising materials due to its high dielectric constant, low leakage current, a TDDB over 10 years and low dissipation factor for high frequency capacitors. In this work, the frequency-dependent characteristic of the BST thin film capacitor is the most important issue. In this work, different compositions of BST thin film were investigations. It includes BaTiO3, Ba0.8Sr0.2TiO3, Ba0.65Sr0.35TiO3, Ba0.5Sr0.5TiO3, Ba0.3Sr0.7TiO3, Ba0.2Sr0.8TiO3, and BaTiO3.