标题: | 利用聚焦离子束光罩制作之灰阶微透镜 Gray-scale Mircolens Fabricated with Focused-Ion-Beam Mask |
作者: | 许英杰 邱一 电控工程研究所 |
关键字: | 灰阶光罩;透镜;聚焦离子束;gray-scale;microlens;FIB |
公开日期: | 2005 |
摘要: | 随着资讯科技的进步,高储存密度及高速度的资料存取的需求也逐渐升高,而光储存科技在其中扮演着相当重要的角色,其微型化及轻量化的应用也使得光储存系统更具有竞争力,而微光机电系统正好是制造更小更轻的光储存系统的方法之一。 微机电制程技术在半导体科技的进步之下日渐成熟,以其制作的微光学读取头乃是实现可携式且高容量的关键技术之一,于本论文中所提到的微光学读取头是由微光学平台及可控式聚焦微透镜所组成,其中的聚焦微透镜正是本论文所研究的重点。 聚焦微透镜有两种,一种是绕射式微透镜,其制作方法较为容易但是效率并不高,另一种是折射式微透镜,其制程较困难而效率高。而由于灰阶光罩技术的发展,折射式微透镜开始于微观世界中崭露头角,但是制程中尚有厚度上的考量,所以本论文所采用的是此两种方式的混合体Fresnel透镜,Fresnel透镜是一种结构特殊介于折射型与绕射型微透镜间的光学元件。 灰阶光罩有许多不同的光罩制作方式,因为微影制程简单,近年来备受瞩目,有半阶光罩、HEBS玻璃灰阶光罩,而在本论文中所采用的是以聚焦离子束将图案刻印于灰阶光罩上的氮化矽,进而利用来制作微透镜,而微透镜设计的大小是100微米,其数值孔径为0.65。 本论文的最终目标是能以聚焦离子束光罩做出微透镜,并且能达到至少直径为600微米的大小,以利能实现制作成微光学读取头之聚焦微透镜,来整合整个微光学平台。 As the progress of information technology, the demand of high capacity and high speed is increasing. Optical data storage technology plays a key role. The application of miniaturization and lightness makes the optical storage system more competitiveness. And Micro-Opto-Electro-Mechanical System (MOEMS) is one of these methods. MEMS fabrication technology matures by the progress of the semiconductor technology, and micro optical pick-up head fabricated by this technology is one of the methods to realize portable high capacity. In this thesis, the micro optical pick-up head is composed of a micro optical bench and a controllable focusing lens bonded together. The focusing lens is main study in this thesis. There are two kinds of focusing lens, one is the diffractive type with simple process and low efficiency, and another is the refractive type with complex process and high efficiency. However, as the gray-scale mask progress, the refractive type becomes attractive in micro size. Cause of the limitation of thickness, the hybrid of these two types, Fresnel lens was used. The Fresnel is a special optical component between the refractive and diffractive type. There are many different mask fabrication process in gray-scale mask, such as the half tone and High Energy Beam Sensitive (HEBS) glass gray-scale mask, and is attractive recently due to the simple lithography process. The gray scale mask to fabricate focusing microlens was made by FIB milling pattern on silicon nitride. The size of the design mircolnes is 100μm, and the numerical aperture is 0.65. Final target in the thesis is to fabricate microlens by FIB mask, and the size of microlens can reach at least 600μm in diameter. In order to realize the focusing microlens of micro optical pick-up head to integrate the micro optical bench. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT009212603 http://hdl.handle.net/11536/68978 |
显示于类别: | Thesis |
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