完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | 楊桂峰 | en_US |
dc.contributor.author | Kuei-Feng Yang | en_US |
dc.contributor.author | 巫木誠 | en_US |
dc.date.accessioned | 2014-12-12T02:29:52Z | - |
dc.date.available | 2014-12-12T02:29:52Z | - |
dc.date.issued | 2002 | en_US |
dc.identifier.uri | http://140.113.39.130/cdrfb3/record/nctu/#NT910031048 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/69807 | - |
dc.description.abstract | 隨著半導體晶圓製造的進步,產品規格精密度要求與日俱增,在晶圓的關鍵製程--黃光微影作業中,由於誤差可容忍度愈來愈小,必須藉由通過固定加工機台的方式,以提昇產品的良率,形成綁機(machine-dedication)限制的問題,當批量做出綁機決策後,及成為該綁機生產線的負荷。 派工法則為製造現場動態控制產品生產週期時間的方法。過去討論綁機情境下的派工法則相當少見。本研究提出考慮綁機負荷與機台可用產能的批量綁機決策,以及流量平衡觀念的黃光區派工法則,透過模擬實驗發現,黃光派工方法對於平均生產週期時間與達交率的績效,相較過去的方法,確有顯著改善,而本研究所提出之批量綁機決策,則無優於過去的方法。 | zh_TW |
dc.description.abstract | The improvement of semiconductor manufacturing technology yields a machine-dedication characteristic. In a wafer fab, a wafer has to visit a workstation several times. A workstation involves a group of machines that are functionally identical. Yet, for some critical workstations, the processing of wafers is in high resolution and should be machine-dedicated. That is, a wafer visiting a machine one time has to be dedicated on the machine for the rest of operations. Dispatching rules concerning the machine-dedication feature has been rarely investigated in literature. This research proposed a SA (starvation avoidance) rule for allocating the wafer lots to the dedicated machines and a flow-balance rule for dispatching the dedicated machines. Extensive simulation experiments show that the flow-balance dispatching rule outperforms the previous methods. Yet, there is no significant difference between the SA allocation rule and others. | en_US |
dc.language.iso | zh_TW | en_US |
dc.subject | 綁機情境限制 | zh_TW |
dc.subject | 流量平衡 | zh_TW |
dc.subject | 批量綁機決策 | zh_TW |
dc.subject | 黃光區派工法則 | zh_TW |
dc.subject | Machine-Dedication | en_US |
dc.subject | Flow-Balance | en_US |
dc.subject | Wafer Allocating | en_US |
dc.subject | Photo Dispatching | en_US |
dc.title | 流量平衡為導向的黃光區綁機派工法 | zh_TW |
dc.title | Flow-Balance Dispatching Rules for Photo Area With Dedicated Machines | en_US |
dc.type | Thesis | en_US |
dc.contributor.department | 工業工程與管理學系 | zh_TW |
顯示於類別: | 畢業論文 |