晶片快速取放機構之設計

Abstract

在半導體製程設備當中，速度是非常重要的考量因素；如何在最短的時間內，生產出最多的產品，一直是所追求的目標。而在半導體後段製程當中，晶片往往需要不斷地傳輸運送；因此晶片的取放是相當關鍵的技術，而晶片快速取放機構也因此扮演著重要的角色。 一般而言，能完成取放動作的機構有很多種，且各有優缺點。除了半導體製設備以外，在其他機械設備當中，也常常利用到取放機構。因此，依照不同要求所做出的設計，其所達成的效果及影響也有所不同。 曲柄搖桿機構在兩個肘節點位置時，曲柄與耦桿皆位在同一直線上；因此對於整體機構所造成之震動較小。將此特性加以利用至取放機構當中，其所造成的震動影響相對減小，精度較易掌控，也因此可減輕設計者的考量因素及負擔。 本論文中，利用機械設計、機動學及材料力學之理論為基礎；同時訂定出設計環境之限制條件；再應用曲柄搖桿機構，設計出晶片快速取放機構。另外利用一組已有的曲柄搖桿晶片快速取放機構作為比較基準，與本論文之設計成果做一比較。在本設計中，利用電腦軟體ADAMS作為輔助工具，分析取放機構在整體運動過程中之動態特性，以更快地達成設計目標；同時也利用電腦軟體Nastran，作為有限元素之分析工具，分析所設計的桿件是否符合強度要求。

High speed is an important issue in the semiconductor processing equipment. In usual, the chip need to be transferred frequently in the semiconductor back-end processing; therefore the pick and place mechanism plays an important role in the semiconductor processing equipment. Beside the semiconductor processing equipment, pick and place mechanism is also used in many other areas. Many kinds of mechanism can achieve the purpose of pick and place, but due to the different characteristics, the design result and effects are different. Crank rocker mechanism has two toggle points, where the crank and coupler are along the same line, small vibration is occurred in the said two toggle points. By using crank rocker as a pick and place mechanism, the vibration can be reduced and precision can be induced; which causes the designer’s work much more simple. In this thesis, the principles of machine design, mechanisms, and mechanics of material are used. The design constraints are carried out, and the crank rocker is used to design a chip’s pick and place mechanism. A chip’s pick and place mechanism designed by ITRI is also shown in order to compare with the present design. Computer software ADAMS and Nastran are used to assist the design procedures. ADAMS is used to analyze the dynamic performance of mechanism, which can also help to optimize the present design. Nastran is used as a tool to check the stiffness of each bar and show the finite element result of the chip’s pick and place mechanism in the present design.