光電元件與異種材料接合技術之研究

Abstract

本論文由發展一高靈敏之光學式生物感測器的光電元件構裝關鍵接合技術，進而探討異種材料接合技術之研究與建立，研究主題分成玻璃與Kovar合金密封接合技術及SUS 316L/JIS G3131活性氬銲技術兩部份。 玻璃對Kovar合金密封接合之探討方面，包括加熱溫度與恆溫時間對於Kovar合金氧化率和玻璃與金屬間潤濕性變化。實驗材料有Kovar合金與ASF110、ASF200R及ASF700三種玻璃。實驗方法採用石英管狀爐進行氧化和潤濕性等實驗。由實驗結果顯示Kovar合金以爐溫700℃維持10分鐘可得到最適合之氧化層；玻璃錠於預先氧化處理的Kovar合金試片具較佳潤濕性。ASF110於預氧化之Kovar合金試片上，其潤濕性較ASF200R與ASF700佳。ASF110與預氧化Kovar合金接合之試片剪切強度約為3.9MPa為最佳。 SUS 316L/JIG 3131活性氬銲之探討方面，由結果顯示使用SiO2活性劑可以增加熔透深度，亦有相對於CaO、Fe2O3及Cr2O3等活性劑之較佳銲道表面品質。此外，除了使銲接熱源集中外，亦具沿厚度方向溫差小和角變形量小等因素，故無空孔也無裂縫，提供銲件良好之銲道品質，銲件拉伸強度值約475Mpa為最佳。

According to the packaging and joining dissimilar materials, this study aims to investigate the technique of glass-Kovar alloy seal and the A-TIG welding technology of SUS 316/JIS G3131. In glass-Kovar alloy seal was to investigate the oxidation of Kovar alloy, the wetting and spreading behavior of hard and soft glass on Kovar alloy by using the sessile drop method, the quality of glass-Kovar seals, and the seal strength of glass-Kovar seals. The experimental results indicate that the preoxidation of Kovar for approximately 10 min at 700 °C in air resulted in excellent adherence in glass-Kovar seals. The wetting and spreading behavior of glass on preoxidized Kovar was superior to that on nonoxidized Kovar. The wetting ability of ASF110 glass was significantly superior to that of ASF200R and ASF700 glass. The seal quality of the glass preoxidized Kovar seal was superior to that of the glass nonoxidized Kovar seal. The shear strength of the ASF110-glass-preoxidized-Kovar seal was approximately 3.9 MPa. In dissimilar metal welding with A-TIG process was to investigate the effect of oxide fluxes on surface appearance, weld morphology, angular distortion, mechanical property, and weld defect. The activated tungsten inert gas (TIG) process applied to the welding of 6 mm thick dissimilar metal plates between SUS 316L/JIS G3131. The CaO, Fe2O3, Cr2O3, and SiO2 fluxes used were packed in powdered form. The results indicated that the TIG welding with SiO2 powder can increase joint penetration and weld depth-to-width ratio, and therefore the angular distortion of the dissimilar weldment can be reduced. Furthermore, the defects susceptibility of the as-welded can also be reduced. The tensile strength of the TIG welding with SiO2 powder was approximately 475 MPa, which was better than CaO, Fe2O3 and Cr2O3 fluxes.