氣溶膠噴塗印刷技術應用於顯示器製程之研究

Abstract

本論文研究探討利用氣溶膠噴塗印刷技術，使功能性墨水霧化成氣溶膠，藉由氣流調控使其材料聚焦並沉積於基板，成功定義圖形線寬範圍從10至100 μm。在這個基礎上，選擇導電與絕緣材料墨水，藉由測試以及優化其控制參數，使線寬縮減至5 μm。鑒於其結果可進一步作為顯示器上的應用，故將此技術導入面板相關製程，其中奈米銀墨水可做為金屬導線、特殊形狀電極以及修復電路，其電阻率可達3.25×10^−8 Ω‧m；透明絕緣材料EOC130可作為絕緣保護層，其厚度1 μm可耐壓50 V以上；架橋電路乃將以上兩種材料合併組成，已實際應用於顯示器與觸控面板上；不透光絕緣材料BM-EK520更首度以噴塗之方式成功噴印至面板作為黑色矩陣。

In this research, the ability of Aerosol Jet Printing (AJP) technique for display devices fabrication was investigated. The specific pattern with 10 to 100 μm line width can be obtained with the proper carrier gas and sheath air flow rate. Sheath air stream offered an annular inward force to control the focus of aerosol stream based to the theory of aerodynamic. The line width can be further reduced to few microns when controlled the flow rate. With optimized flow rate, the 5.1 μm width Ag traces were able to be printed as the conductive lines. The superior resistivity, 3.25×10−8 Ω‧m, was measured after low temperature sintering (250 ℃). In addition, the transparent dielectric ink, EOC130, was printed as protection layers which resisted at least 50 V bias. Moreover, the jumper circuit could be printed directly on display, touch panel and the other devices. Finally, the black matrix can be printed directly by using the BM-EK520 dielectric ink.