應用適應控制之H型壓電陀螺儀的設計與控制

Abstract

近十年來，微機電系統(MEMS)感測器的發展逐漸受到矚目。受惠於現今積體電路製造技術，微機電系統通常具有小尺寸和輕量化等微型設計的優點。本文主要目的在設計一種可利用現今製造技術生產之微機電型態的壓電式陀螺儀。根據現有之H型陀螺儀所具有的低電耦合與低機械耦合效應之優點，本文提出了新式H型壓電陀螺儀並且探討其型態的概念設計和相關的耦合效應。另外，根據壓電陀螺儀的操作原則，再搭配上適應性控制的演算法則，將可鑑別且消除在製程上所產生的校正偏差和機電耦合效應。

Microelectromechanical systems (MEMS) sensors have received lots of attention over the last decade. With the virtue from present IC fabrication techniques, they generally have the advantages of being lightweight, being small in size, etc. In this thesis, we designed a MEMS PZT gyroscope based on the in-situ fabrication process. The conceptual design and the coupling effects in our proposed gyroscope are presented in this report. This design is based on the existing H-type gyroscope, which has the advantage of reducing electrostatic and mechanical coupling effects existed in between the driving and detecting axes. The fabrication errors and the electromechanical coupling were identified and null out by the adaptive algorithms along the operation of this gyroscope.