線性馬達運動系統在微觀區下之系統鑑別及控制

Abstract

本論文主要在探討直線馬達在微觀區下刺毛的動態行為，系統在巨觀下會因受到摩擦力影響，而影響馬達的定位精準度，所以需要摩擦力補償器來解決此現象。系統若是在起動區，或是所謂的黏滑區時，此時就沒有摩擦力的問題了，因為系統的動態只剩下刺毛的行為，亦即刺毛未斷離接觸表面。本文就是要把刺毛未斷離時的系統動態鑑別出來，有了此估測模型，就可以知道刺毛在微觀下的特性，並設計其控制器。在做大範圍定位時，我們採取用巨觀控制器先做大範圍追跡控制，等系統快進入預定位置時，在切換到微觀控制器做微觀定位控制；由實驗的結果得知，這樣的二階段控制比起都用巨觀控制器的性能明顯好很多，而且其安定時間有很明顯的改善。這樣一來，系統在做定位控制時，只要運用切換到微觀控制器定位，即可不需性能很強大的巨觀控制器來完成。

The mainly researches of this thesis is to analyze the dynamic behavior of the bristles under the micro-dynamic scale for a linear-motor-driven motion stage. The system would be influenced by the friction force under macro-dynamic scale. The accuracy of the motor has a little deviation, consequently, we need the friction compensator in order to solve this phenomenon. If the system is in the presliding region or known as stick-slip region, at this time, there is no more friction phenomenon. The behavior of system is only left bristles dynamic, that is to say, the bristle hasn’t broken away the contact surface yet. Therefore, the thesis mainly identifies the bristles dynamic behavior before it breaks away from the contact surface. With this estimated model, we are able to understand the characteristics of the bristles under the micro-dynamic scale, and design the micro-type controller. In the period of performing the macro-dynamic scale positioning control, in the beginning, we can adopt the macro-type controller to perform the macro-scale tracking control. When the system is about to enter the desired position, we can switch the macro-type controller to micro-type controller to perform the micro-dynamic scale positioning control. The experimental results show the performance with this two stages control architecture is obviously much superior to that with only used the macro-type controller, and the settling time of the system is obviously improved. In this way, as long as we used it well that switching to the micro-type controller when the system is in the period of performing positioning control, we don’t need the powerful macro-type controller to achieve the positioning control.