具有微流道之可撓電磁式能量轉換器

Abstract

能量擷取已經是一個十分重要的研究領域，已發展了十數年，早期的能量轉換器都是製作在堅硬的基板上，而近年此領域的研究方向傾向於在軟性的基板上製作可撓的能量轉換器。 本論文利用PDMS為材料，利用PDMS接合的技術製作出封閉的微流道，而在流道內注入磁液和矽油兩相液體。磁液在有外加壓力時即會流動，由於其導磁率的差異，使得元件的磁場分布改變，進而擷取能量。此方式有別於傳統的振動電磁式能量轉換器。由於液體具有可形變的特性，使得製造出一個具有微流體的可撓式能量轉換器是可行的。元件的設計、理論分析、製程步驟、量測結果和改善方法皆十分詳細的被記載，且部分的效應也可以被合理解釋。當元件在下壓頻率20Hz、下壓深度0.9mm和外加負載10Ω時，有最大輸出功率60.9pW。

Energy harvesting has a very important position in the academy field for over ten years. Earlier devices are fabricated on rigid substrates. Nowadays, this field focuses on fabricating micro-power generators on flexible substrates. In this thesis, we use PDMS to fabricate device and bond PDMS to form an enclosed cavity. Then, we inject ferro-fluid and silicon oil in the cavity. When the device is pressed, the two fluids will flow back and forth. Because of the permeability difference between the two fluids, the magnetic flux will change with time in the device, making it possible to harvest energy from this phenomenon. This method is different from the traditional vibrational electromagnetic energy harvesters. Because fluid is mobile, it is possible to make a flexible energy harvester with micro fluid in it. Design, theory, fabrication process, measurement results and improvements are discussed in this thesis. The maximum output power of device is 60.9pW when the pressing displacement is 0.9mm and pressing frequency is 20Hz.