標題: | SiGe nanorings by ultrahigh vacuum chemical vapor deposition |
作者: | Lee, C. -H. Shen, Y. -Y. Liu, C. W. Lee, S. W. Lin, B. -H. Hsu, C. -H. 光電工程學系 Department of Photonics |
關鍵字: | annealing;chemical vapour deposition;diffusion;Ge-Si alloys;nanofabrication;Raman spectra;semiconductor growth;semiconductor materials;semiconductor quantum dots;silicon;X-ray diffraction |
公開日期: | 6-四月-2009 |
摘要: | Formation of SiGe nanorings from Si capped Si(0.1)Ge(0.9) quantum dots (QDs) grown at 500 degrees C by ultrahigh vacuum chemical vapor deposition was investigated. SiGe nanorings have average diameter, width, and depth of 185, 30, and 9 nm, respectively. Based on both Raman and x-ray diffraction results, the formation of SiGe nanorings can be attributed to Ge outdiffusion from central SiGe QDs during in situ annealing. Moreover, the depth of SiGe nanorings can be controlled by Si cap thickness. The Si cap is essential for nanorings formation. |
URI: | http://dx.doi.org/10.1063/1.3116619 http://hdl.handle.net/11536/7374 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.3116619 |
期刊: | APPLIED PHYSICS LETTERS |
Volume: | 94 |
Issue: | 14 |
結束頁: | |
顯示於類別: | 期刊論文 |