以平行平板濕式固氣分離器探討填充式洗滌塔的去除效率

Abstract

This study used a parallel plate wet denuder coupled with ion chromatograph (PPWD-IC) to measure soluble gas pollutant concentrations and removal efficiency of packed towers. Gas pollutant concentrations measured by the PPWD-IC system were first validated with a manual porous metal denuder sampler (PDS) as a reference. Test results show that the collection efficiency of the PPWD-IC system operating at 5 L/min is nearly 100% for HF, HCl and CH3COOH, respectively. The comparison of these three gases show that concentration measured by the PPWD-IC system agree well with those obtained by PDS with correlation of determinant (R2) greater than 0.93. The PPWD was then applied to measure the removal efficiency of packed towers in high-tech factories continuously. Results show that the removal efficiency of gaseous pollutants is low and variable when the inlet concentration is low.

This study used a parallel plate wet denuder coupled with ion chromatograph (PPWD-IC) to measure soluble gas pollutant concentrations and removal efficiency of packed towers. Gas pollutant concentrations measured by the PPWD-IC system were first validated with a manual porous metal denuder sampler (PDS) as a reference. Test results show that the collection efficiency of the PPWD-IC system operating at 5 L/min is nearly 100% for HF, HCl and CH3COOH, respectively. The comparison of these three gases show that concentration measured by the PPWD-IC system agree well with those obtained by PDS with correlation of determinant (R2) greater than 0.93. The PPWD was then applied to measure the removal efficiency of packed towers in high-tech factories continuously. Results show that the removal efficiency of gaseous pollutants is low and variable when the inlet concentration is low.