标题: 利用脉冲式电镀法合成钴镍锰磷与氧化铝奈米复合硬磁 与相关特性改善之研究
Material Synthesis and Property improvement of CoNiMnP-AAO Nanocomposite Using Pulse Electroplating Technique
作者: 吴品儒
Wu, Ping-Ju
郑裕庭
Cheng, Yu-Ting
电子工程学系 电子研究所
关键字: 钴镍锰磷;磁性材料;阳极氧化铝;脉冲电镀;CoNiMnP;Magnetic Material;AAO;Pulse Elctroplating
公开日期: 2013
摘要: 在本论文中,成功地将钴镍锰磷磁性奈米柱合成在具奈米孔洞的阳极氧化铝膜中,形成奈米复合磁铁薄膜;利用脉冲式电镀法制成直径为200 ±15奈米、不同高宽比的镍锰磷磁性奈米柱。相较于直流电镀法,脉冲式电镀法可减少永久性磁性奈米柱的缺陷,提升材料分布之均匀性,进而改善微结构下之磁性奈米柱之磁特性。因此,矫顽力2472.3 Oe、最大磁能积16.13 kJ/m3和方正性0.59得以被实现。此外,我们已成功地堆叠、黏合并磁化15层的钴镍锰磷磁性奈米柱-阳极氧化铝之复合薄膜,堆叠后之总体积为9mm3;此堆叠复合磁性薄膜之最大表面磁场为4.99mT,和市售尺寸3.14mm3的钐钴圆柱磁铁之最大表面磁场相比,堆叠复合磁性薄膜已达其值之30%。该结果显示了未来在MEMS应用上,利用与CMOS相容之制程所制成的微型磁铁的潜力。
In this thesis, CoNiMnP magnetic nanowires have been successfully synthesized with different aspect ratios in the AAO membrane, which is 200±15nm in diameter to form a nanocomposite magnet using pulse electrodeposition method. Comparing with the direct current plating method, such a technique can provide better material characteristics in terms of less defect and good homogeneity in the microstructure of the magnetic nanowires. Accordingly, the coercivity of 2472.30Oe, maximum energy density product, BHmax, of 16.13 kJ/m3, and squareness up to 0.59 can be achieved. In addition, we have successfully stacked, bonded, and magnetized 15 layers of CoNiMnP-AAO nanocomposite with the size of 9 mm3, the highest surface magnetic field strength can be as high as 4.99mT, which is almost 30% of the field strength from the one made of commercial SmCo cylinder hard magnet with the size of 3.14mm3. The results have shown the potential development of the micromagnets, which can be fabricated using CMOS compatible process for future MEMS applications.
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT070050284
http://hdl.handle.net/11536/74507
显示于类别:Thesis